Products
Intelligent Loading and Unloading Machine
The Intelligent loading and unloading machine automates ceramic polishing plate handling for CMP processes in sapphire and semiconductor manufacturing.
Features
Application
The Intelligent loading and unloading machine automates ceramic polishing plate handling for CMP processes in sapphire and semiconductor manufacturing. Featuring a bilateral symmetric structure, this advanced system services two polishing hosts simultaneously with a single automated unit.
BTR360 Intelligent loading and unloading machine
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Model number |
BTR360 |
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Size of ceramic plate |
Φ360mmx15mm |
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Transplanting platform |
Number of workstations |
Three workstations |
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The number of ceramic discs loaded into a single card |
4 pieces (a total of 12 pieces) |
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Position conversion mode |
Servo motor + lead screw slide rail |
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The clamping method of ceramic plates |
Vacuum adsorption |
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Mechanical arm |
Z shaft |
Itinerary |
1045mm |
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Drive motor |
750W |
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Y shaft |
Itinerary |
660mm |
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Drive motor |
200W |
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The θ -axis mechanical arm rotates |
Angle |
340° |
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Drive motor |
1500W |
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Finger rotation |
Angle |
360° |
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Drive motor |
200W |
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Brush the ceramic plate |
Drive motor |
750W |
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BTR-520 Intelligent loading and unloading machine
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Model number |
BTR-520 |
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Single cycle time for loading and unloading(min) |
5min/run |
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Suitable for ceramic plates(mm) |
≤φ520x20 |
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Scan the dock to read the code size range(mm) |
70x50 |
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Up Time |
≥99% |
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Abnormal alarm frequency |
≤0.5% |
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MTBF(Mean time between failures) |
≥1200h |
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MTTR(Average repair timeAverage repair time) |
≤2h |
BTR-546 Intelligent loading and unloading machine
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Model number |
BTR-546 |
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Single cycle time for loading and unloading(min) |
5min/run |
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Suitable for ceramic plates(mm) |
≤φ546x20 |
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Scan the dock to read the code size range(mm) |
70x50 |
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Up Time |
≥99% |
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Abnormal alarm frequency |
≤0.5% |
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MTBF(Mean time between failures) |
≥1200h |
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MTTR(Average repair time) |
≤2h |
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