Products
Semi-automatic Single-axis Air Floating Grinder
The Semi-automatic single-axis air floating grinder delivers precision thinning of hard brittle materials including silicon, germanium, quartz, GaAs, ceramics, sapphire, and SiC. This advanced equipment also performs critical backside thinning applications for integrated circuits (ICs), discrete devices, and LED chips.
Features
Application
The Semi-automatic single-axis air floating grinder delivers precision thinning of hard brittle materials including silicon, germanium, quartz, GaAs, ceramics, sapphire, and SiC. This advanced equipment also performs critical backside thinning applications for integrated circuits (ICs), discrete devices, and LED chips. Featuring air-flotation technology, the semi-automatic single-axis air floating grinder enables direct grinding on etched or polished surfaces using fine-grit wheels - significantly reducing wafer-to-wafer thickness variation while improving Total Thickness Variation (TTV) and flatness uniformity within wafers.
SFG300-A-S Semi-automatic single-axis air floating grinder
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Model number |
SFG300-A-S single-spindle single-side thinning machine |
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Wafer diameter |
Max σ12" |
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spindle |
Spindle type |
High frequency motor with built-in aerostatic spindle |
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Spindle number |
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Rated power |
12KW |
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Speed |
0-4000rpm |
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Minimum z-axis movement |
0.1μm |
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Z-axis resolution |
0.1μm |
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Measuring instrument |
Measuring range |
0-1200μm |
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Resolution |
0.1μm |
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repeatability |
±0.5μm |
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Bearing table |
Bearing table spindle type |
aerostatic spindle |
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Bearing table type |
Porous ceramic table |
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Fixed mode |
Vacuum fixation |
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Speed |
0-400rpm |
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Bearing table number |
1 |
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Equipment size (L * W * H) |
About 2026mm*800mm*1915mm |
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Device weight |
About 2500KG |
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